High Spatial Resolution Mapping of Resistivity Variations in Semiconductors

Joseph Kopanski; G. P. Carver; J R. Lowney; D. S. Miles; Donald B. Novotny

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PUBLICATIONS

High Spatial Resolution Mapping of Resistivity Variations in Semiconductors

Published

December 31, 1992

Author(s)

Joseph Kopanski, G. P. Carver, J R. Lowney, D. S. Miles, Donald B. Novotny

Citation

Solid-State Electronics

Volume

Issue

Pub Type

Journals

Citation

Kopanski, J. , Carver, G. , Lowney, J. , Miles, D. and Novotny, D. (1992), High Spatial Resolution Mapping of Resistivity Variations in Semiconductors, Solid-State Electronics (Accessed August 21, 2026)

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Created December 30, 1992, Updated October 12, 2021

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