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High-Precision Optical Reflectometer for the Study of Semiconductor Materials and Structures
Published
Author(s)
M I. Bell, D. A. McKeown
Citation
Review of Scientific Instruments
Volume
61
Issue
10
Pub Type
Journals
Citation
Bell, M.
and McKeown, D.
(1990),
High-Precision Optical Reflectometer for the Study of Semiconductor Materials and Structures, Review of Scientific Instruments
(Accessed June 2, 2023)