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High-Precision Optical Reflectometer for the Study of Semiconductor Materials and Structures

Published

Author(s)

M I. Bell, D. A. McKeown
Citation
Review of Scientific Instruments
Volume
61
Issue
10

Citation

Bell, M. and McKeown, D. (1990), High-Precision Optical Reflectometer for the Study of Semiconductor Materials and Structures, Review of Scientific Instruments (Accessed March 5, 2024)
Created September 30, 1990, Updated October 12, 2021