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Hidden in Plain Sight: Calcium Fluoride's Intrinsic Birefringence
Published
Author(s)
John H. Burnett, Zachary H. Levine, Eric L. Shirley
Abstract
We discuss the phenomena of intrinsic birefringence in cubic crystals that we first characterized experimentally and theoretically in ultraviolet optical materials. We analyze the wavelength dependence, the angular dependence, and symmetry of the effect. We consider the implications for 157 nm lithography, and suggest various compensating strategies.
Citation
Photonics Spectra
Volume
35
Issue
No. 12
Pub Type
Journals
Keywords
157nm, birefringence, CaF2, calcium fluoride
Citation
Burnett, J.
, Levine, Z.
and Shirley, E.
(2001),
Hidden in Plain Sight: Calcium Fluoride's Intrinsic Birefringence, Photonics Spectra
(Accessed May 29, 2023)