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Hidden in Plain Sight: Calcium Fluoride's Intrinsic Birefringence

Published

Author(s)

John H. Burnett, Zachary H. Levine, Eric L. Shirley

Abstract

We discuss the phenomena of intrinsic birefringence in cubic crystals that we first characterized experimentally and theoretically in ultraviolet optical materials. We analyze the wavelength dependence, the angular dependence, and symmetry of the effect. We consider the implications for 157 nm lithography, and suggest various compensating strategies.
Citation
Photonics Spectra
Volume
35
Issue
No. 12

Keywords

157nm, birefringence, CaF2, calcium fluoride

Citation

Burnett, J. , Levine, Z. and Shirley, E. (2001), Hidden in Plain Sight: Calcium Fluoride's Intrinsic Birefringence, Photonics Spectra (Accessed April 20, 2024)
Created December 1, 2001, Updated February 17, 2017