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PUBLICATIONS

Hidden in Plain Sight: Calcium Fluoride's Intrinsic Birefringence

Published

Author(s)

John H. Burnett, Zachary H. Levine, Eric L. Shirley

Abstract

We discuss the phenomena of intrinsic birefringence in cubic crystals that we first characterized experimentally and theoretically in ultraviolet optical materials. We analyze the wavelength dependence, the angular dependence, and symmetry of the effect. We consider the implications for 157 nm lithography, and suggest various compensating strategies.
Citation
Photonics Spectra
Volume
35
Issue
No. 12
Pub Type
Journals

Keywords

157nm, birefringence, CaF2, calcium fluoride

Citation

Burnett, J. , Levine, Z. and Shirley, E. (2001), Hidden in Plain Sight: Calcium Fluoride's Intrinsic Birefringence, Photonics Spectra (Accessed May 4, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created December 1, 2001, Updated February 17, 2017