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Growth of SnO2 Films on Micromachined Hotplates

Published

Author(s)

Richard E. Cavicchi, John S. Suehle, Kenneth G. Kreider, B. L. Shomaker, John A. Small, Michael Gaitan, P Chaparala
Citation
Applied Physics Letters
Volume
66
Issue
7

Citation

Cavicchi, R. , Suehle, J. , Kreider, K. , Shomaker, B. , Small, J. , Gaitan, M. and Chaparala, P. (1995), Growth of SnO<sub>2</sub> Films on Micromachined Hotplates, Applied Physics Letters (Accessed June 13, 2024)

Issues

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Created February 12, 1995, Updated October 12, 2021