Doyle, J.
, Doughty, D.
and Gallagher, A.
(1991),
Germane discharge chemistry, Journal of Applied Physics (Accessed October 29, 2026)
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Germane discharge chemistry
Published
Author(s)
J R. Doyle, D A. Doughty, A Gallagher
Citation
Journal of Applied Physics
Volume
69
Pub Type
Journals
Citation
Issues
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Created January 1, 1991, Updated February 17, 2017