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Germane discharge chemistry

Published

Author(s)

J R. Doyle, D A. Doughty, A Gallagher
Citation
Journal of Applied Physics
Volume
69

Citation

Doyle, J. , Doughty, D. and Gallagher, A. (1991), Germane discharge chemistry, Journal of Applied Physics (Accessed July 23, 2024)

Issues

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Created January 1, 1991, Updated February 17, 2017