Maher, D.
and Richter, C.
(2000),
Gate Dielectric Metrology Review: Project FEPZ001 Year 2 Report, International SEMATECH Report
(Accessed December 9, 2024)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Gate Dielectric Metrology Review: Project FEPZ001 Year 2 Report
Published
Author(s)
Dennis Maher,
Citation
International SEMATECH Report
Pub Type
Others
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created December 31, 1999, Updated October 12, 2021