Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Gate Dielectric Metrology Review: Project FEPZ001 Year 2 Report

Published

Author(s)

Dennis Maher, Curt A. Richter
Citation
International SEMATECH Report

Citation

Maher, D. and Richter, C. (2000), Gate Dielectric Metrology Review: Project FEPZ001 Year 2 Report, International SEMATECH Report (Accessed June 21, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created December 31, 1999, Updated October 12, 2021