Maher, D.
and Richter, C.
(2000),
Gate Dielectric Metrology Review: Project FEPZ001 Year 2 Report, International SEMATECH Report
(Accessed April 26, 2025)
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Gate Dielectric Metrology Review: Project FEPZ001 Year 2 Report
Published
Author(s)
Dennis Maher,
Citation
International SEMATECH Report
Pub Type
Others
Citation
Issues
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Created December 31, 1999, Updated October 12, 2021