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Fundamental Atomic Xenon Data for EUV Source Modeling

Published

Author(s)

John D. Gillaspy
Citation
SPIE

Keywords

atomic data, benchmarking, cross sections, electron beam ion trap (EBIT, energy levels, euv light sources, euv lithography, wavelengths, xenon

Citation

Gillaspy, J. (2008), Fundamental Atomic Xenon Data for EUV Source Modeling, SPIE (Accessed April 19, 2024)
Created October 16, 2008