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PUBLICATIONS

Fundamental Atomic Xenon Data for EUV Source Modeling

Published

Author(s)

John D. Gillaspy
Citation
SPIE
Pub Type
Journals

Keywords

atomic data, benchmarking, cross sections, electron beam ion trap (EBIT, energy levels, euv light sources, euv lithography, wavelengths, xenon

Citation

Gillaspy, J. (2008), Fundamental Atomic Xenon Data for EUV Source Modeling, SPIE (Accessed October 11, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created October 16, 2008
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