Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

A Framework for Standard Modular Simulation: Application to Semiconductor Wafer Fabrication



J A. Ramirez-hernandez, H Li, E Fernandez, Charles R. McLean, Swee K. Leong


This paper presents the application of a framework, proposed by the National Institute of Standards and Technology (NIST), for standard modular simulation of semiconductor wafer fabrication facilities or fabs. The application of the proposed framework results in the identication and specication of four different elements in the context of semiconductor fabs: (1) market sector, (2) hierarchical modeling levels, (3) simulation case studies, and (4) models and data. Three examples of the application of the proposed simulation framework are presented by using three semiconductor fab models: the Mini-fab benchmark, Measurement and Improvement of Manufacturing Capacities (MIMAC) data set 1, and the Hewlett-Packard-Wein's model. In these examples, three different case studies are presented, which consisted in the evaluation of production performance under different workforces, dispatching rules, and wafer lot release rates. The proposed simulation framework is by no means considered complete, and future additions and modications are expected. Our current and future research is focused on the improvement of the proposed framework (e.g., design and testing of generic case studies) as well as the incorporation of the work being conducted by NIST, within the NIST's System Integration of Manufacturing Applications (SIMA) program, towards the standardization of data formats for simulation in manufacturing systems.
NIST Interagency/Internal Report (NISTIR) - 7236
Report Number


front-end process, semiconductor fabs, Semiconductor wafer fabrication, simulation case studies, simulation framework, standard modular simulation


Ramirez-hernandez, J. , Li, H. , Fernandez, E. , McLean, C. and Leong, S. (2005), A Framework for Standard Modular Simulation: Application to Semiconductor Wafer Fabrication, NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD, [online],, (Accessed July 23, 2024)


If you have any questions about this publication or are having problems accessing it, please contact

Created May 31, 2005, Updated October 12, 2021