A Framework for Standard Modular Simulation: Application to Semiconductor Wafer Fabrication

Published

June 1, 2005

Author(s)

J A. Ramirez-hernandez, H Li, E Fernandez, Charles R. McLean, Swee K. Leong

Abstract

This paper presents the application of a framework, proposed by the National Institute of Standards and Technology (NIST), for standard modular simulation of semiconductor wafer fabrication facilities or fabs. The application of the proposed framework results in the identication and specication of four different elements in the context of semiconductor fabs: (1) market sector, (2) hierarchical modeling levels, (3) simulation case studies, and (4) models and data. Three examples of the application of the proposed simulation framework are presented by using three semiconductor fab models: the Mini-fab benchmark, Measurement and Improvement of Manufacturing Capacities (MIMAC) data set 1, and the Hewlett-Packard-Wein's model. In these examples, three different case studies are presented, which consisted in the evaluation of production performance under different workforces, dispatching rules, and wafer lot release rates. The proposed simulation framework is by no means considered complete, and future additions and modications are expected. Our current and future research is focused on the improvement of the proposed framework (e.g., design and testing of generic case studies) as well as the incorporation of the work being conducted by NIST, within the NIST's System Integration of Manufacturing Applications (SIMA) program, towards the standardization of data formats for simulation in manufacturing systems.

Citation

NIST Interagency/Internal Report (NISTIR) - 7236

Report Number

7236

NIST Pub Series

NIST Interagency/Internal Report (NISTIR)

Pub Type

NIST Pubs

Download Paper

https://doi.org/10.6028/NIST.IR.7236

Local Download

Keywords

front-end process, semiconductor fabs, Semiconductor wafer fabrication, simulation case studies, simulation framework, standard modular simulation

Citation

Ramirez-hernandez, J. , Li, H. , Fernandez, E. , McLean, C. and Leong, S. (2005), A Framework for Standard Modular Simulation: Application to Semiconductor Wafer Fabrication, NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NIST.IR.7236, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=822299 (Accessed May 2, 2026)

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