Fiber Deflection Probe Uncertainty Analysis for Micro Holes
Bala Muralikrishnan, Jack A. Stone Jr., John R. Stoup
We have recently reported on a new probe, the Fiber Deflection Probe (FDP), for diameter and form measurement of large aspect ratio micro-holes (100 um nominal diameter, 5 mm deep). In this paper, we briefly review the measurement principle of the FDP. Then, we discuss different error sources and present uncertainty budget for diameter measurements. Our analysis indicates an expanded uncertainty of only 0.07 um on diameter.
NCSL International Measure: The Journal of Measurement Science 2006
, Stone Jr., J.
and Stoup, J.
Fiber Deflection Probe Uncertainty Analysis for Micro Holes, NCSL International Measure: The Journal of Measurement Science 2006, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=823200
(Accessed December 7, 2023)