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Fiber Deflection Probe Uncertainty Analysis for Micro Holes

Published

Author(s)

Bala Muralikrishnan, Jack A. Stone Jr., John R. Stoup

Abstract

We have recently reported on a new probe, the Fiber Deflection Probe (FDP), for diameter and form measurement of large aspect ratio micro-holes (100 um nominal diameter, 5 mm deep). In this paper, we briefly review the measurement principle of the FDP. Then, we discuss different error sources and present uncertainty budget for diameter measurements. Our analysis indicates an expanded uncertainty of only 0.07 um on diameter.
Citation
NCSL International Measure: The Journal of Measurement Science 2006

Keywords

coordinate metrology, fiber probe, microfeature metrology, small hole, uncertainty analysis

Citation

Muralikrishnan, B. , Stone Jr., J. and Stoup, J. (2006), Fiber Deflection Probe Uncertainty Analysis for Micro Holes, NCSL International Measure: The Journal of Measurement Science 2006, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=823200 (Accessed June 15, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created December 31, 2005, Updated October 12, 2021