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Fast Temperature Programmed Sensing for Micro-Hotplate Gas Sensors

Published

Author(s)

Richard E. Cavicchi, John S. Suehle, Kenneth G. Kreider, Michael Gaitan, P Chaparala
Citation
IEEE Electron Device Letters
Volume
16
Issue
6

Citation

Cavicchi, R. , Suehle, J. , Kreider, K. , Gaitan, M. and Chaparala, P. (1995), Fast Temperature Programmed Sensing for Micro-Hotplate Gas Sensors, IEEE Electron Device Letters, [online], https://doi.org/10.1109/55.790737, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=15372 (Accessed June 15, 2024)

Issues

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Created December 30, 1995, Updated October 12, 2021