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Fabry-Perrot cavity-based silicon photonic thermometers with ultra-small footprint and high-sensitivity
Published
Author(s)
Nikolai N. Klimov, Thomas P. Purdy, Zeeshan Ahmed
Abstract
In this work we report on the development of silicon photonic temperature sensors with ultra-small foot print and high temperature sensitivity as an alternative solution to legacy-based resistance thermometers.
Klimov, N.
, Purdy, T.
and Ahmed, Z.
(2015),
Fabry-Perrot cavity-based silicon photonic thermometers with ultra-small footprint and high-sensitivity, Advance photonics congress, boston, MA, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=918199
(Accessed October 10, 2025)