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Fabrication, Testing and Simulation of All Solid State Three Dimensional Li-ion Batteries



Alec Talin, Dimitry Ruzmetov, Andrei Kolmakov, Kim McKelvey, N Ware, Farid El Gabaly, Bruce Dunn, Henry White


In this paper we demonstrate fully-functional 3D SSLIBs fabricated using materials and thin film deposition methods compatible with semiconductor device processing. These 3D SSLIBs consist of conical or cylindrical Si microcolumns onto which layers corresponding to the current collector, cathode, electrolyte and anode, are sequentially deposited using physical vapor deposition (PVD). Using galvanostatic charge/discharge cycling, we demonstrate that the power performance of the 3D SSLIBs lags significantly behind that of similarly prepared planar SSLIBs. Analysis of the experimental results using finite element modeling indicates that the origin of the poor power performance is the structural inhomogeneity of the 3D SSLIB, coupled with low electrolyte ionic conductivity, which lead to highly non-uniform internal current density distribution and poor cathode utilization.
ACS Applied Materials and Interfaces


3D battery, thin solid state Li ion battery


Talin, A. , Ruzmetov, D. , Kolmakov, A. , McKelvey, K. , Ware, N. , El Gabaly, F. , Dunn, B. and White, H. (2016), Fabrication, Testing and Simulation of All Solid State Three Dimensional Li-ion Batteries, ACS Applied Materials and Interfaces, [online],, (Accessed June 13, 2024)


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Created November 9, 2016, Updated October 12, 2021