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Fabrication Techniques to Realize CMOS-compatible Microfluidic Microchannels

Published

Author(s)

A. L. Rasmussen, Michael Gaitan, Laurie E. Locascio, Mona E. Zaghloul
Citation
JMEMS
Volume
10
Issue
2

Citation

Rasmussen, A. , Gaitan, M. , Locascio, L. and Zaghloul, M. (2001), Fabrication Techniques to Realize CMOS-compatible Microfluidic Microchannels, JMEMS (Accessed June 20, 2024)

Issues

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Created May 31, 2001, Updated October 12, 2021