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Fabrication Techniques to Realize CMOS-compatible Microfluidic Microchannels
Published
Author(s)
A. L. Rasmussen, Michael Gaitan, Laurie E. Locascio, Mona E. Zaghloul
Citation
JMEMS
Volume
10
Issue
2
Pub Type
Journals
Citation
Rasmussen, A.
, Gaitan, M.
, Locascio, L.
and Zaghloul, M.
(2001),
Fabrication Techniques to Realize CMOS-compatible Microfluidic Microchannels, JMEMS
(Accessed December 7, 2023)