Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Fabrication Issues for the Prototype NIST SRM 2090A SEM Magnification Calibration Standard

Published

Author(s)

B Newell, Michael T. Postek, J VanDerZiel

Abstract

A new National Institute of Standards and Technology scanning electron microscope magnification calibration standard has been fabricated and distributed in production prototype form. The SRM 2090A samples contain structures ranging in pitch from 3000 um to 0.2 um and are useful at both high-and low-accelerating voltages. The design and fabrication of the samples has incorporated many of the improvements suggested through two previous prototype series. This article discusses optimization of the lithographic techniques in the fabrication process. We used electron beam lithography for fabrication because of the 0.1 um features required on the samples. After liftoff, unexpected linewidth differences were measured among the smallest features. These differences were reduced through modification of the electron beam writing paths. We propose that the resist heating effect caused an axial dependence among features fabricated using the original electron beam writing paths. In addition, the susceptibility of the present prototype design to electron beam proximity effects was analyzed. Proximity effects from the 9 um range of backscattered electrons have little effect on the pitch structures of the prototype but may impact development of the prototype as a linewidth standard.
Citation
Journal of Vacuum Science and Technology B
Volume
13(6)

Citation

Newell, B. , Postek, M. and VanDerZiel, J. (1995), Fabrication Issues for the Prototype NIST SRM 2090A SEM Magnification Calibration Standard, Journal of Vacuum Science and Technology B (Accessed May 20, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created October 31, 1995, Updated October 12, 2021