Fabrication of High-Speed and High-Density Single-Flux-Quantum Circuits at NIST

Published

June 11, 2017

Author(s)

David Olaya, Paul Dresselhaus, Pete Hopkins, Samuel P. Benz

Abstract

The development of a fabrication process for single-flux-quantum (SFQ) digital circuits is a fundamental part of the NIST effort to develop a gigahertz waveform synthesizer with quantum voltage accuracy. This paper describes the current SFQ fabrication process used at NIST's Boulder Microfabrication Facility based on Josephson junctions with niobium superconducting electrodes and self-shunted niobium-doped silicon barriers. The planned circuits will be used to explore metrology for advanced computing and communications. We will also describe anticipated process changes and innovations aimed toward further increasing circuit density and clock frequency.

Proceedings Title

International Superconductive Electronics Conference

Conference Dates

June 12-16, 2017

Conference Location

Sorrento, IT

Pub Type

Conferences

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Keywords

Josephson junctions, self-shunted junction, RSFQ, superconducting integrated circuit, superconductor electronics

Citation

Olaya, D. , Dresselhaus, P. , Hopkins, P. and Benz, S. (2017), Fabrication of High-Speed and High-Density Single-Flux-Quantum Circuits at NIST, International Superconductive Electronics Conference, Sorrento, IT, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=923315 (Accessed October 10, 2025)