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Fabrication of High-Speed and High-Density Single-Flux-Quantum Circuits at NIST



David Olaya, Paul Dresselhaus, Pete Hopkins, Samuel P. Benz


The development of a fabrication process for single-flux-quantum (SFQ) digital circuits is a fundamental part of the NIST effort to develop a gigahertz waveform synthesizer with quantum voltage accuracy. This paper describes the current SFQ fabrication process used at NIST's Boulder Microfabrication Facility based on Josephson junctions with niobium superconducting electrodes and self-shunted niobium-doped silicon barriers. The planned circuits will be used to explore metrology for advanced computing and communications. We will also describe anticipated process changes and innovations aimed toward further increasing circuit density and clock frequency.
Proceedings Title
International Superconductive Electronics Conference
Conference Dates
June 12-16, 2017
Conference Location
Sorrento, IT


Josephson junctions, self-shunted junction, RSFQ, superconducting integrated circuit, superconductor electronics


Olaya, D. , Dresselhaus, P. , Hopkins, P. and Benz, S. (2017), Fabrication of High-Speed and High-Density Single-Flux-Quantum Circuits at NIST, International Superconductive Electronics Conference, Sorrento, IT, [online], (Accessed April 15, 2024)
Created June 11, 2017, Updated April 12, 2022