Fabrication of High-Speed and High-Density Single-Flux-Quantum Circuits at NIST
David I. Olaya, Paul D. Dresselhaus, Peter F. Hopkins, Samuel P. Benz
The development of a fabrication process for single-flux-quantum (SFQ) digital circuits is a fundamental part of the NIST effort to develop a gigahertz waveform synthesizer with quantum voltage accuracy. This paper describes the current SFQ fabrication process used at NISTs Boulder Microfabrication Facility based on Josephson junctions with niobium superconducting electrodes and self-shunted niobium-doped silicon barriers. The planned circuits will be used to explore metrology for advanced computing and communications. We will also describe anticipated process changes and innovations aimed toward further increasing circuit density and clock frequency.
International Superconductive Electronics Conference
, Dresselhaus, P.
, Hopkins, P.
and Benz, S.
Fabrication of High-Speed and High-Density Single-Flux-Quantum Circuits at NIST, International Superconductive Electronics Conference, Sorrento, -1, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=923315
(Accessed October 17, 2021)