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Fabrication and Characterization of Patterned Single-Crystal Silicon Nanolines



Bin Li, Min K. Kang, Kuan Lu, Rui Huang, Paul S. Ho, Richard A. Allen, Michael W. Cresswell


This letter demonstrates a method to fabricate single-crystal Si nanolines, with a rectangular cross section and atomically flat sidewalls. The high quality of these nanolines leads to superb mechanical properties, with the strain to fracture estimated by nanoindentation tests close to the theoretical limit. A large displacement burst before fracture was observed, which is attributed to a buckling mechanism. Numerical simulations show that the critical load for buckling depends on the friction at the contact surface.
Nano Letters


buckling, displacement burst, fabrication, fracture, friction, gratings, lattice-plane-selective etching, MEMS, nano-indentation measurement, nano-line, silicon, simulation, strain


Li, B. , Kang, M. , Lu, K. , Huang, R. , Ho, P. , Allen, R. and Cresswell, M. (2007), Fabrication and Characterization of Patterned Single-Crystal Silicon Nanolines, Nano Letters, [online], (Accessed April 20, 2024)
Created December 6, 2007, Updated October 12, 2021