Li, B.
, Kang, M.
, Lu, K.
, Huang, R.
, Ho, P.
, Allen, R.
and Cresswell, M.
(2007),
Fabrication and Characterization of Patterned Single-Crystal Silicon Nanolines, Nano Letters, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32747
(Accessed September 8, 2024)
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Fabrication and Characterization of Patterned Single-Crystal Silicon Nanolines
Published
Author(s)
Bin Li, Min K. Kang, Kuan Lu, Rui Huang, Paul S. Ho, ,
Abstract
This letter demonstrates a method to fabricate single-crystal Si nanolines, with a rectangular cross section and atomically flat sidewalls. The high quality of these nanolines leads to superb mechanical properties, with the strain to fracture estimated by nanoindentation tests close to the theoretical limit. A large displacement burst before fracture was observed, which is attributed to a buckling mechanism. Numerical simulations show that the critical load for buckling depends on the friction at the contact surface.Citation
Nano Letters
Volume
8
Issue
1
Pub Type
Journals
Download Paper
Keywords
buckling, displacement burst, fabrication, fracture, friction, gratings, lattice-plane-selective etching, MEMS, nano-indentation measurement, nano-line, silicon, simulation, strain
Citation
Issues
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Created December 6, 2007, Updated October 12, 2021