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Fabrication and Characterization of Humidity Sensors based on CVD Grown MoS2 Thin Film



Shiqi Guo, Abbas Arab, Sergiy Krylyuk, Albert Davydov, Mona E. Zaghloul


Recent advances in two-dimensional (2D) transition metal dichalcogenides have demonstrated their potential application in chemical sensors. However, the chemical vapor deposition (CVD) grown molybdenum disulfide (MoS2) humidity sensors are still largely unexplored. In this work, MoS2 thin films were grown on 1 cm2 sapphire substrates through sulfurization of e-beam deposited Mo layers. The MoS2 film morphology, thickness, and crystallinity were characterized by AFM and Raman spectroscopy. The two-terminal devices were fabricated with e-beam evaporated interdigitated electrodes (IDEs) on top of the MoS2 surface. The water vapor sensing was tested at various humidity levels with the observed increase in the device resistance response to humidity due to the charge transfer mechanism. We found the devices to be reproducible and with excellent dynamic hysteresis. The sensitivity, fast response and recovery proved that CVD growth MoS2 thin film could be scaled up for humidity and gas sensing applications.
Proceedings Title
IEEE conference proceedings
Conference Dates
July 25-28, 2017
Conference Location
Pittsburg, PA
Conference Title
The 17th IEEE International Conference on Nanotechnology (IEEE-Nano 2017)


MoS2, humidity sensor


Guo, S. , Arab, A. , Krylyuk, S. , Davydov, A. and Zaghloul, M. (2017), Fabrication and Characterization of Humidity Sensors based on CVD Grown MoS2 Thin Film, IEEE conference proceedings, Pittsburg, PA (Accessed April 23, 2024)
Created July 25, 2017, Updated February 21, 2020