Klimov, N.
, Purdy, T.
and Ahmed, Z.
(2015),
Fabrication and Characterization of On-Chip Integrated Silicon Photonic Bragg Grating and Photonic Crystal Cavity Thermometers, 2015 TechConnect World Innovation Conference , Washington , DC, US, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=918438
(Accessed October 10, 2025)
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Fabrication and Characterization of On-Chip Integrated Silicon Photonic Bragg Grating and Photonic Crystal Cavity Thermometers
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Abstract
We report on the fabrication and characterization of photonic-based nanothermometers, a silicon photonic Bragg grating and photonic crystal cavity. When cladded with silicon dioxide layer the sensors have at least eight times better sensitivity compared to the sensitivity of conventional fiber Bragg grating sensors. We demonstrate that these photonic thermometers are viable temperature sensing solution.Conference Dates
June 15-18, 2015
Conference Location
Washington , DC, US
Conference Title
2015 TechConnect World Innovation Conference
Pub Type
Conferences
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Keywords
photonics, photonic crystal cavity, thermometer, temperature, silicon
Citation
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Created June 29, 2015, Updated October 12, 2021