Wunsch, T.
, Manginell, R.
, Solomon, O.
, Kinard Jr., J.
, Lipe Jr., T.
and Jungling, K.
(2001),
Evaluation of Coaxial Single Range Thermal Voltage Converters with Multijunction Thin-Film Thermoelements, Proc. IEEE Instrumentation and Technology Conference (IMTC), Budapest, 1, HU, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=4163
(Accessed December 12, 2024)
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Evaluation of Coaxial Single Range Thermal Voltage Converters with Multijunction Thin-Film Thermoelements
Published
Author(s)
Thomas F. Wunsch, Ronald R. Manginell, O. M. Solomon, , , K. C. Jungling
Abstract
New standards for ac current and voltage measurements, thin-film multijunction thermal converters (MJTCs), have been fabricated using thin-film and micro-electro-mechanical systems (MEMS) technology. Improved sensitivity and accuracy over single-junction thermoelements and targeted performance allow new measurement approaches in traditionally troublesome areas such as the low frequency and high current regimes. A review is presented of new microfabrication techniques and packaging methods that have resulted from a collaborative effort at Sandia National Laboratories and the National Institute of Standards and Technology (NIST).Proceedings Title
Proc. IEEE Instrumentation and Technology Conference (IMTC)
Conference Dates
May 21-23, 2001
Conference Location
Budapest, 1, HU
Pub Type
Conferences
Download Paper
Keywords
ac-dc difference, Bosch etch, deep reactive ion etch, planar thermal converter, thin-film converter
Citation
Issues
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Created April 30, 2001, Updated October 12, 2021