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Evaluation of Coaxial Single Range Thermal Voltage Converters with Multijunction Thin-Film Thermoelements

Published

Author(s)

Thomas F. Wunsch, Ronald R. Manginell, O. M. Solomon, Joseph R. Kinard Jr., Thomas E. Lipe Jr., K. C. Jungling

Abstract

New standards for ac current and voltage measurements, thin-film multijunction thermal converters (MJTCs), have been fabricated using thin-film and micro-electro-mechanical systems (MEMS) technology. Improved sensitivity and accuracy over single-junction thermoelements and targeted performance allow new measurement approaches in traditionally troublesome areas such as the low frequency and high current regimes. A review is presented of new microfabrication techniques and packaging methods that have resulted from a collaborative effort at Sandia National Laboratories and the National Institute of Standards and Technology (NIST).
Proceedings Title
Proc. IEEE Instrumentation and Technology Conference (IMTC)
Conference Dates
May 21-23, 2001
Conference Location
Budapest, 1, HU

Keywords

ac-dc difference, Bosch etch, deep reactive ion etch, planar thermal converter, thin-film converter

Citation

Wunsch, T. , Manginell, R. , Solomon, O. , Kinard Jr., J. , Lipe Jr., T. and Jungling, K. (2001), Evaluation of Coaxial Single Range Thermal Voltage Converters with Multijunction Thin-Film Thermoelements, Proc. IEEE Instrumentation and Technology Conference (IMTC), Budapest, 1, HU, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=4163 (Accessed February 27, 2024)
Created April 30, 2001, Updated October 12, 2021