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ESR Study of E' Trapping Centers in SIMOX Oxides, Extended Abstract

Published

Author(s)

J. F. Conley, Patrick M. Lenahan, Peter Roitman
Proceedings Title
Proc., 1991 International SOI Conference
Conference Dates
October 1-3, 1991
Conference Location
Vail Valley, CO, USA

Citation

Conley, J. , Lenahan, P. and Roitman, P. (1991), ESR Study of E' Trapping Centers in SIMOX Oxides, Extended Abstract, Proc., 1991 International SOI Conference, Vail Valley, CO, USA (Accessed April 26, 2024)
Created December 30, 1991, Updated October 12, 2021