The response of a scanning Kelvin force microscope (SKFM) was measured with conventional micromachined silicon tips coated with Au and with advanced tips terminated with a carbon nanotube (CNT). A simple model of the SKFM predicts enhanced spatial resolution of SKFM using a CNT terminated tip because it reduces the stray capacitance components due to the tip shank and the cantilever. Measurements over abrupt boundaries between Au and silicon (with a thin silicon dioxide overlayer) show the predicted enhanced spatial resolution.
Proceedings Title: AIP Conference Proceedings, Frontiers of Characterization and Metrology for Nanoelectronics: 2009
Conference Dates: May 11-14, 2009
Conference Location: Albany, NY
Conference Title: Frontiers of Characterization and Metrology for Nanoelectronics: 2009
Pub Type: Conferences
carbon nanotube, scanning Kelvin force microscope, SKFM, spatial resolution, work function