Kopanski, J.
, McClure, P.
and Mancevski, V.
(2009),
Enhanced Spatial Resolution Scanning Kelvin Force Microscopy Using Conductive Carbon Nanotube Tips, AIP Conference Proceedings, Frontiers of Characterization and Metrology for Nanoelectronics: 2009, Albany, NY, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=903125
(Accessed December 3, 2023)
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Enhanced Spatial Resolution Scanning Kelvin Force Microscopy Using Conductive Carbon Nanotube Tips
Published
Author(s)
, Paul McClure, Vladimir Mancevski
Abstract
The response of a scanning Kelvin force microscope (SKFM) was measured with conventional micromachined silicon tips coated with Au and with advanced tips terminated with a carbon nanotube (CNT). A simple model of the SKFM predicts enhanced spatial resolution of SKFM using a CNT terminated tip because it reduces the stray capacitance components due to the tip shank and the cantilever. Measurements over abrupt boundaries between Au and silicon (with a thin silicon dioxide overlayer) show the predicted enhanced spatial resolution.Proceedings Title
AIP Conference Proceedings, Frontiers of Characterization and Metrology for Nanoelectronics: 2009
Conference Dates
May 11-14, 2009
Conference Location
Albany, NY
Conference Title
Frontiers of Characterization and Metrology for Nanoelectronics: 2009
Pub Type
Conferences
Download Paper
Keywords
carbon nanotube, scanning Kelvin force microscope, SKFM, spatial resolution, work function
Citation
Created October 5, 2009, Updated February 19, 2017