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Enhanced Spatial Resolution Scanning Kelvin Force Microscopy Using Conductive Carbon Nanotube Tips

Published

Author(s)

Joseph J. Kopanski, Paul McClure, Vladimir Mancevski

Abstract

The response of a scanning Kelvin force microscope (SKFM) was measured with conventional micromachined silicon tips coated with Au and with advanced tips terminated with a carbon nanotube (CNT). A simple model of the SKFM predicts enhanced spatial resolution of SKFM using a CNT terminated tip because it reduces the stray capacitance components due to the tip shank and the cantilever. Measurements over abrupt boundaries between Au and silicon (with a thin silicon dioxide overlayer) show the predicted enhanced spatial resolution.
Proceedings Title
AIP Conference Proceedings, Frontiers of Characterization and Metrology for Nanoelectronics: 2009
Conference Dates
May 11-14, 2009
Conference Location
Albany, NY
Conference Title
Frontiers of Characterization and Metrology for Nanoelectronics: 2009

Keywords

carbon nanotube, scanning Kelvin force microscope, SKFM, spatial resolution, work function

Citation

Kopanski, J. , McClure, P. and Mancevski, V. (2009), Enhanced Spatial Resolution Scanning Kelvin Force Microscopy Using Conductive Carbon Nanotube Tips, AIP Conference Proceedings, Frontiers of Characterization and Metrology for Nanoelectronics: 2009, Albany, NY, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=903125 (Accessed June 15, 2024)

Issues

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Created October 5, 2009, Updated February 19, 2017