Skip to main content

NOTICE: Due to a lapse in annual appropriations, most of this website is not being updated. Learn more.

Form submissions will still be accepted but will not receive responses at this time. Sections of this site for programs using non-appropriated funds (such as NVLAP) or those that are excepted from the shutdown (such as CHIPS and NVD) will continue to be updated.

U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Energy Dispersive X-Ray Spectrometry With the Transition Edge Sensor Microcalorimeter: A Revolutionary Advance in Materials Microanalysis

Published

Author(s)

Dale E. Newbury, David A. Wollman, Kent D. Irwin, Gene C. Hilton, John M. Martinis

Abstract

The NIST microcalorimeter energy dispersive x-ray spectrometer provides important advances in x-ray spectrometry. The high spectral resolution, approaching 2 eV for photon energies below 2 keV, the wide photon energy coverage, 250 eV to 10 keV, and the energy dispersive operation enable a wide range of materials characterization problems to be addressed. This performance is especially critical to high spatial resolution, low voltage x-ray microanalysis performed with the field emission gun scanning electron microscope.
Citation
Advances in Materials Problem Solving with the Electron Microscope MRS Proceedings Volume 589
Volume
589

Keywords

analysis, energy dispersive x-ray spectrometry, microanalysis, microcalorimetry, scanning electron microscopy

Citation

Newbury, D. , Wollman, D. , Irwin, K. , Hilton, G. and Martinis, J. (1999), Energy Dispersive X-Ray Spectrometry With the Transition Edge Sensor Microcalorimeter: A Revolutionary Advance in Materials Microanalysis, Advances in Materials Problem Solving with the Electron Microscope MRS Proceedings Volume 589 (Accessed October 8, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created December 1, 1999, Updated February 19, 2017
Was this page helpful?