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Energy Dispersive X-Ray Spectrometry With the Transition Edge Sensor Microcalorimeter: A Revolutionary Advance in Materials Microanalysis

Published

Author(s)

Dale E. Newbury, David A. Wollman, Kent D. Irwin, Gene C. Hilton, John M. Martinis

Abstract

The NIST microcalorimeter energy dispersive x-ray spectrometer provides important advances in x-ray spectrometry. The high spectral resolution, approaching 2 eV for photon energies below 2 keV, the wide photon energy coverage, 250 eV to 10 keV, and the energy dispersive operation enable a wide range of materials characterization problems to be addressed. This performance is especially critical to high spatial resolution, low voltage x-ray microanalysis performed with the field emission gun scanning electron microscope.
Citation
Advances in Materials Problem Solving with the Electron Microscope MRS Proceedings Volume 589
Volume
589

Keywords

analysis, energy dispersive x-ray spectrometry, microanalysis, microcalorimetry, scanning electron microscopy

Citation

Newbury, D. , Wollman, D. , Irwin, K. , Hilton, G. and Martinis, J. (1999), Energy Dispersive X-Ray Spectrometry With the Transition Edge Sensor Microcalorimeter: A Revolutionary Advance in Materials Microanalysis, Advances in Materials Problem Solving with the Electron Microscope MRS Proceedings Volume 589 (Accessed March 3, 2024)
Created December 1, 1999, Updated February 19, 2017