Newbury, D.
, Wollman, D.
, Irwin, K.
, Hilton, G.
and Martinis, J.
(1999),
Energy Dispersive X-Ray Spectrometry With the Transition Edge Sensor Microcalorimeter: A Revolutionary Advance in Materials Microanalysis, Advances in Materials Problem Solving with the Electron Microscope MRS Proceedings Volume 589
(Accessed October 20, 2025)
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Energy Dispersive X-Ray Spectrometry With the Transition Edge Sensor Microcalorimeter: A Revolutionary Advance in Materials Microanalysis
Published
Author(s)
, , , , John M. Martinis
Abstract
The NIST microcalorimeter energy dispersive x-ray spectrometer provides important advances in x-ray spectrometry. The high spectral resolution, approaching 2 eV for photon energies below 2 keV, the wide photon energy coverage, 250 eV to 10 keV, and the energy dispersive operation enable a wide range of materials characterization problems to be addressed. This performance is especially critical to high spatial resolution, low voltage x-ray microanalysis performed with the field emission gun scanning electron microscope.Citation
Advances in Materials Problem Solving with the Electron Microscope MRS Proceedings Volume 589
Volume
589
Pub Type
Others
Keywords
analysis, energy dispersive x-ray spectrometry, microanalysis, microcalorimetry, scanning electron microscopy
Citation
Issues
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Created December 1, 1999, Updated February 19, 2017