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Energy Dispersive X-ray Analysis using a Microcalorimeter Detector



W. Harris, L. Le Tarte, H. Bakhru, W. Gibson, D. Wu, Robert E. Geer, David A. Wollman


Energy dispersive X-ray analysis (EDX) is widely used within the semiconductor community for chemical analysis and identification of features observed in scanning electron microscopy images. While this technique provides valuable information for defect characterization, current commercially available detector technology suffers from poor energy resolving power and is thus prone to peak overlaps. The transition edge sensor (TES) microcalorimeter detector developed at NIST provides a high-energy resolution alternative that dramatically increases the capability of SEM-EDX analysis.
Proceedings Title
AIP Conf. Proc.
Conference Dates
June 26-29, 2000
Conference Location
Gaithersburg, MD, USA
Conference Title
2000 Intl Conf. Characterization & Metrology for ULSI Tech.


interconnect materials, microcalorimeter, TaSiN


Harris, W. , Le Tarte, L. , Bakhru, H. , Gibson, W. , Wu, D. , Geer, R. and Wollman, D. (2001), Energy Dispersive X-ray Analysis using a Microcalorimeter Detector, AIP Conf. Proc., Gaithersburg, MD, USA (Accessed May 22, 2024)


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Created January 28, 2001, Updated October 12, 2021