Energy Dispersive X-ray Analysis using a Microcalorimeter Detector
W. Harris, L. Le Tarte, H. Bakhru, W. Gibson, D. Wu, Robert E. Geer, David A. Wollman
Energy dispersive X-ray analysis (EDX) is widely used within the semiconductor community for chemical analysis and identification of features observed in scanning electron microscopy images. While this technique provides valuable information for defect characterization, current commercially available detector technology suffers from poor energy resolving power and is thus prone to peak overlaps. The transition edge sensor (TES) microcalorimeter detector developed at NIST provides a high-energy resolution alternative that dramatically increases the capability of SEM-EDX analysis.
AIP Conf. Proc.
June 26-29, 2000
Gaithersburg, MD, USA
2000 Intl Conf. Characterization & Metrology for ULSI Tech.
interconnect materials, microcalorimeter, TaSiN
, Le Tarte, L.
, Bakhru, H.
, Gibson, W.
, Wu, D.
, Geer, R.
and Wollman, D.
Energy Dispersive X-ray Analysis using a Microcalorimeter Detector, AIP Conf. Proc., Gaithersburg, MD, USA
(Accessed December 9, 2023)