Energy Dispersive X-ray Analysis using a Microcalorimeter Detector

Published

January 29, 2001

Author(s)

W. Harris, L. Le Tarte, H. Bakhru, W. Gibson, D. Wu, Robert E. Geer, David A. Wollman

Abstract

Energy dispersive X-ray analysis (EDX) is widely used within the semiconductor community for chemical analysis and identification of features observed in scanning electron microscopy images. While this technique provides valuable information for defect characterization, current commercially available detector technology suffers from poor energy resolving power and is thus prone to peak overlaps. The transition edge sensor (TES) microcalorimeter detector developed at NIST provides a high-energy resolution alternative that dramatically increases the capability of SEM-EDX analysis.

Proceedings Title

AIP Conf. Proc.

Volume

550

Issue

1

Conference Dates

June 26-29, 2000

Conference Location

Gaithersburg, MD, USA

Conference Title

2000 Intl Conf. Characterization & Metrology for ULSI Tech.

Pub Type

Conferences

Keywords

interconnect materials, microcalorimeter, TaSiN

Citation

Harris, W. , Le Tarte, L. , Bakhru, H. , Gibson, W. , Wu, D. , Geer, R. and Wollman, D. (2001), Energy Dispersive X-ray Analysis using a Microcalorimeter Detector, AIP Conf. Proc., Gaithersburg, MD, USA (Accessed November 4, 2025)