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Electron Traps, Structural Change, and Hydrogen-Related SIMOX Defects

Published

Author(s)

J. F. Conley, Patrick M. Lenahan, Peter Roitman
Proceedings Title
Proc., IEEE International SOI Conference
Conference Dates
October 6-8, 1992
Conference Location
Ponte Vedra Beach, FL, USA

Citation

Conley, J. , Lenahan, P. and Roitman, P. (1992), Electron Traps, Structural Change, and Hydrogen-Related SIMOX Defects, Proc., IEEE International SOI Conference, Ponte Vedra Beach, FL, USA (Accessed June 20, 2024)

Issues

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Created December 30, 1992, Updated October 12, 2021