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Electron Interactions with Plasma Processing Gases



Loucas G. Christophorou, James K. Olthoff
Special Publication (NIST SP) - 926
Report Number


Christophorou, L. and Olthoff, J. (1998), Electron Interactions with Plasma Processing Gases, Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD, [online],, (Accessed June 16, 2024)


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Created July 31, 1998, Updated October 12, 2021