Christophorou, L.
and Olthoff, J.
(1998),
Electron Interactions with Plasma Processing Gases, Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NIST.SP.926, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=16721
(Accessed December 14, 2024)
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Electron Interactions with Plasma Processing Gases
Published
Author(s)
Loucas G. Christophorou,
Citation
Special Publication (NIST SP) - 926
Report Number
926
NIST Pub Series
Pub Type
NIST Pubs
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Citation
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If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created July 31, 1998, Updated October 12, 2021