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PUBLICATIONS

Electron Interactions with Plasma Processing Gases

Published

Author(s)

Loucas G. Christophorou, James K. Olthoff
Citation
Special Publication (NIST SP) - 926
Report Number
926
NIST Pub Series
Special Publication (NIST SP)
Pub Type
NIST Pubs

Download Paper

https://doi.org/10.6028/NIST.SP.926
Local Download
Electronics and Advanced communications

Citation

Christophorou, L. and Olthoff, J. (1998), Electron Interactions with Plasma Processing Gases, Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NIST.SP.926, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=16721 (Accessed October 17, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created July 31, 1998, Updated October 12, 2021
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