Christophorou, L.
and Olthoff, J.
(1998),
Electron Interactions with Plasma Processing Gases, Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NIST.SP.926, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=16721
(Accessed October 10, 2024)