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Electron Interactions with Plasma Processing Gases

Published

Author(s)

Loucas G. Christophorou, James K. Olthoff
Citation
Special Publication (NIST SP) - 926
Report Number
926

Citation

Christophorou, L. and Olthoff, J. (1998), Electron Interactions with Plasma Processing Gases, Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NIST.SP.926, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=16721 (Accessed October 10, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created July 31, 1998, Updated October 12, 2021