Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Electron Interactions with Plasma Processing Gases

Published

Author(s)

Loucas G. Christophorou, James K. Olthoff
Citation
Special Publication (NIST SP) - 926
Report Number
926

Citation

Christophorou, L. and Olthoff, J. (1998), Electron Interactions with Plasma Processing Gases, Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NIST.SP.926, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=16721 (Accessed June 16, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created July 31, 1998, Updated October 12, 2021