Christophorou, L.
, Olthoff, J.
and Rao, M.
(1996),
Electron Interactions With C<sub>3</sub>F<sub>8</sub>, J. Phys. & Chem. Ref. Data (JPCRD), National Institute of Standards and Technology, Gaithersburg, MD
(Accessed December 6, 2024)
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Electron Interactions With C3F8
Published
Author(s)
Loucas G. Christophorou, , MVVS. Rao
Abstract
To aid the many and diverse applications for which perfluoropropane (C3F8) is suited, we critically evaluate and synthesize existing knowledge on electron scattering and electron energy-loss processes for the C3F8 molecule, and provide recommendations for the most reliable data. We also draw attention to electron-interaction data that are not presently available, but are needed for modeling the behavior of C3F8 in practical uses, especially plasma processing.Citation
J. Phys. & Chem. Ref. Data (JPCRD) -
Volume
25
Issue
5
NIST Pub Series
Pub Type
NIST Pubs
Keywords
C<sub>3</sub>F<sub>8</sub>, cross sections, electron attachment, electron collisions, electron transport, perfluoropropane, scattering
Citation
Issues
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Created September 1, 1996, Updated October 12, 2021