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Electron Interactions With C3F8

Published

Author(s)

Loucas G. Christophorou, James K. Olthoff, MVVS. Rao

Abstract

To aid the many and diverse applications for which perfluoropropane (C3F8) is suited, we critically evaluate and synthesize existing knowledge on electron scattering and electron energy-loss processes for the C3F8 molecule, and provide recommendations for the most reliable data. We also draw attention to electron-interaction data that are not presently available, but are needed for modeling the behavior of C3F8 in practical uses, especially plasma processing.
Citation
J. Phys. & Chem. Ref. Data (JPCRD) -
Volume
25
Issue
5

Keywords

C<sub>3</sub>F<sub>8</sub>, cross sections, electron attachment, electron collisions, electron transport, perfluoropropane, scattering

Citation

Christophorou, L. , Olthoff, J. and Rao, M. (1996), Electron Interactions With C<sub>3</sub>F<sub>8</sub>, J. Phys. & Chem. Ref. Data (JPCRD), National Institute of Standards and Technology, Gaithersburg, MD (Accessed May 21, 2024)

Issues

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Created September 1, 1996, Updated October 12, 2021