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Electron Inelastic Mean Free Paths in Solids at Low Energies

Published

Author(s)

Shigeo Tanuma, Cedric J. Powell, David R. Penn

Abstract

We have calculated electron inelastic mean free paths (IMFPs) for 50-200 eV electrons in 31 materials (27 elements and 4 compounds). These calculations extend those previously reported for 200-2000 eV electrons in the same materials but avoid an approximation valid for electron energies above 200 eV. IMFP results are presented in this paper for magnesium, aluminum, silicon, nickel, copper and gold. The IMFP dependence on electron energy in the range 50-200 eV varies considerably from material to material; these variations are associated with substantial differences in the electron energy-loss functions amongst the materials. We have also extended the general IMFP formula derived earlier to describe the calculated IMFPs over the 50-2000 eV energy range.
Citation
Journal of Electron Spectroscopy and Related Phenomena
Volume
52

Citation

Tanuma, S. , Powell, C. and Penn, D. (1990), Electron Inelastic Mean Free Paths in Solids at Low Energies, Journal of Electron Spectroscopy and Related Phenomena, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=620371 (Accessed April 18, 2024)
Created December 31, 1989, Updated October 12, 2021