Electron Collision Cross Section Data For Plasma Modeling
W M. Huo, Yong Sik Kim
An overview of the current status in electron collision cross section database for plasma modeling is presented. Emphasis is on dissociation, ionization, and dissociative ionization. The effect of the operating conditions on the relative importance of different collision mechanisms is discussed. For high density plasmas with low gas pressure, a second collision with electrons becomes more likely and metastable states may play a more important role in the dissociation and ionization processes. A number of outstanding theoretical and experimental issues in the cross section data are discussed. For the total ionization cross section, a four-parameter fitting formula is found to represent the numerical data well and the parameters for some used in plasma modeling are presented.
IEEE Transactions on Plasma Science
electron collision, molecules, plasma modeling
and Kim, Y.
Electron Collision Cross Section Data For Plasma Modeling, IEEE Transactions on Plasma Science
(Accessed March 1, 2024)