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Electron Collision Cross Section Data For Plasma Modeling

Published

Author(s)

W M. Huo, Yong Sik Kim

Abstract

An overview of the current status in electron collision cross section database for plasma modeling is presented. Emphasis is on dissociation, ionization, and dissociative ionization. The effect of the operating conditions on the relative importance of different collision mechanisms is discussed. For high density plasmas with low gas pressure, a second collision with electrons becomes more likely and metastable states may play a more important role in the dissociation and ionization processes. A number of outstanding theoretical and experimental issues in the cross section data are discussed. For the total ionization cross section, a four-parameter fitting formula is found to represent the numerical data well and the parameters for some used in plasma modeling are presented.
Citation
IEEE Transactions on Plasma Science
Volume
27
Issue
No. 5

Keywords

electron collision, molecules, plasma modeling

Citation

Huo, W. and Kim, Y. (1999), Electron Collision Cross Section Data For Plasma Modeling, IEEE Transactions on Plasma Science (Accessed March 1, 2024)
Created September 30, 1999, Updated October 12, 2021