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Electron Backscatter Diffraction (EBSD) of Single Particles

Published

Author(s)

John A. Small

Abstract

Over the years several different methods have been developed for the quantitative x-ray microanalysis of individual particles Small (1981), Armstrong (1991). Despite the large number of quantitative methods available, the accuracy for the x-ray microanalysis of particles, as shown in Fig. 1, has been limited to roughly 10 % relative uncertainty which compares to 5 % for the same material analyzed as a bulk sample. At this level of accuracy, an unambiguous identification of the chemical phase of a given particle is often difficult. The relatively poor accuracy for quantitative particle analysis results from difficulties in predicting x-ray generation and emission from particles because of their size and morphology (Small 1981). Given the often large uncertainties associated with the quantitative x-ray microanalysis of particles, (EBSD) offers an alternative approach to particle analysis that can be used in conjunction with quantitative x-ray microanalysis to identify the chemical-phase of crystalline particles.
Proceedings Title
Proceedings of the Third International Conference on Microelectronics and Interfaces
Conference Dates
February 11-14, 2002
Conference Title
Third International Conference on Microelectronics and Interfaces

Keywords

EBSD, electron backscattered diffraction, electron beam microanalysis, particle analysis

Citation

Small, J. (2002), Electron Backscatter Diffraction (EBSD) of Single Particles, Proceedings of the Third International Conference on Microelectronics and Interfaces (Accessed April 23, 2024)
Created February 1, 2002, Updated February 17, 2017