Mayo, S.
and Schafft, H.
(1995),
Electrical Characterization of Integrated Circuit Metal Line Thickness, Solid-State Electronics
(Accessed December 13, 2024)
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Electrical Characterization of Integrated Circuit Metal Line Thickness
Published
Author(s)
,
Citation
Solid-State Electronics
Volume
38
Issue
12
Pub Type
Journals
Citation
Issues
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Created December 30, 1995, Updated October 12, 2021