Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Electrical Characterization of Integrated Circuit Metal Line Thickness

Published

Author(s)

Santos D. Mayo, Harry A. Schafft
Citation
Solid-State Electronics
Volume
38
Issue
12

Citation

Mayo, S. and Schafft, H. (1995), Electrical Characterization of Integrated Circuit Metal Line Thickness, Solid-State Electronics (Accessed March 1, 2024)
Created December 30, 1995, Updated October 12, 2021