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Electrical Characterization of Integrated Circuit Metal Line Thickness

Published

Author(s)

Santos D. Mayo, Harry A. Schafft
Citation
Solid-State Electronics
Volume
38
Issue
12

Citation

Mayo, S. and Schafft, H. (1995), Electrical Characterization of Integrated Circuit Metal Line Thickness, Solid-State Electronics (Accessed December 9, 2024)

Issues

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Created December 30, 1995, Updated October 12, 2021