Electric Force Microscopy with a Single Carbon Nanotube Tip
John A. Dagata, F S. Chien, S Gwo, K Morimoto, T Inoue, J Itoh, H Yokoyama
Carbon nanotube tips offer a significant improvement over standard scanned probe microscope (SPM) tips for electrical characterization of nanodevice structures. Carbon nanotube tips are compatible with requirements for integrated SPM probe station instruments in which SPM-based lithography, topography, electric force microscopy, and traditional current-voltage measurements are performed simultaneously, or sequentially. As device dimensions shrink, traditional diagnostics will be unable to probe nanometer-scale phenomena that affect device performance and reliability. At the same time, the introduction of novel materials such as silicon-on-insulator into standard processing will require methods that can rapidly identify defects and their local behavior. Electric force microscopy with carbon nanotube tips offers unique capabilities for satisfying these needs.
Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XV, Neal T. Sullivan, Editor
February 26, 2001
Santa Clara, CA
carbon nanotube, electric force microscopy, lithography, scanned probe microscopy, silicon-on-insulator
, Chien, F.
, Gwo, S.
, Morimoto, K.
, Inoue, T.
, Itoh, J.
and Yokoyama, H.
Electric Force Microscopy with a Single Carbon Nanotube Tip, Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XV, Neal T. Sullivan, Editor, Santa Clara, CA
(Accessed December 7, 2023)