Effects of Deposition Process Parameters on Exchange Coupling of A-Fe2O3/NiFe Bi-Layers and GMR in A-Fe2O3/NiFe/Cu/NiFe Spin Valves
S Bae, William F. Egelhoff Jr., P J. Chen, J Judy
The anti-ferromagnetic material used for the exchange biasing layer in multilayer GMR spin valve structure requires a high blocking temperature, high corrosion resistance, and high resistivity for appolications such as magnetic recording read heads and sensors. Since a-Fe2O3 has a high Neel temperature ('680 degree C), high resistivity, and has a large GMR ration, it has receive attention recently as a promising anti-ferromagnetic GMR spin valves.In this study, the exchange coupling of a-Fe2Oc/NiFe bi-layers were investigated as a function of sputtering deposition process parameters. In particular, the oxygen partial pressure, substrate bias, and input power of reacctively RF-sputtered a-Fe2O3 were controlled as the experimental process parameters. In addition, the effects of the NiFe thickness and deposition rate on exchange coupling of a-Fe2O3/NiFe bi-layers were investigated. The GMR ratio of a-Fe2O3/NiFe based spin valves with different a-Fe2O3 input powers and different NiFe thicknesses werre studies for the multilayered structure of Si/a-Fe2O3(50 nm)/NiFe/Cu/NiFe bottom spin valves.
IEEE Transactions on Magnetics
exchange coupling, giant magnetoresistance, iron oxide spin valves
, Egelhoff Jr., W.
, Chen, P.
and Judy, J.
Effects of Deposition Process Parameters on Exchange Coupling of A-Fe<sub>2</sub>O<sub>3</sub>/NiFe Bi-Layers and GMR in A-Fe<sub>2</sub>O<sub>3</sub>/NiFe/Cu/NiFe Spin Valves, IEEE Transactions on Magnetics
(Accessed December 3, 2023)