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Effect of Bandwidth and Numerical Aperture in Optical Scatterometry

Published

Author(s)

Thomas A. Germer, Heather J. Patrick

Abstract

We consider the effects of finite spectral bandwidth and numerical aperture in scatterometry measurements and discuss efficient integration methods based upon Gaussian quadrature in one dimension (for spectral bandwidth averaging) and two dimensions inside a circle (for numerical aperture averaging). Provided the wavelength is not near a Wood's anomaly, we find that the resulting methods converge very quickly to a level suitable for most measurement applications. In the vicinity of a Wood's anomaly, however, the methods provide rather poor behavior. We also describe a method that can be used to extract the effective spectral bandwidth and numerical aperture for a scatterometry tool. We find that accounting for spectral bandwidth and numerical aperture is necessary to obtain satisfactory results in scatterometry.
Proceedings Title
Metrology, Inspection, and Process Control for Microlithography XXIV
Conference Dates
February 21-25, 2010
Conference Location
San Jose, CA

Keywords

optical critical dimension metrology, scatterometry

Citation

Germer, T. and Patrick, H. (2010), Effect of Bandwidth and Numerical Aperture in Optical Scatterometry, Metrology, Inspection, and Process Control for Microlithography XXIV, San Jose, CA, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=905013 (Accessed March 3, 2024)
Created March 1, 2010, Updated February 19, 2017