Direct Measurement of Cantilever Spring Constants and Correction of Cantilever Irregularities Using an Instrumented Indenter
Z C. Ying, Mark Reitsma, Richard S. Gates
A method is presented that allows direct measurement of a wide range of spring constants of cantilevers using an indentation instrument with an integrated optical microscope. An accuracy of better than 10% can be achieved for spring constants from 0.1 N/m to 102 N/m. The technique makes it possible to measure the spring constant at any desired location on a cantilever of any shape, particularly at the tip location of an atomic force microscopy cantilever. The paper also demonstrates a technique to detect and correct apparent length anomalies of cantilevers by analyzing spring constants at multiple positions.
, Reitsma, M.
and Gates, R.
Direct Measurement of Cantilever Spring Constants and Correction of Cantilever Irregularities Using an Instrumented Indenter, Review of Scientific Instruments, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=850970
(Accessed February 29, 2024)