DEVELOPMENT OF A MINIATURE, MULTICHANNEL, EXTENDED-RANGE FABRY-PEROT FIBER-OPTIC LASER INTERFEROMETER SYSTEM FOR LOW FREQUENCY SI-TRACEABLE DISPLACEMENT MEASUREMENT

Published

October 12, 2014

Author(s)

Bartosz K. Nowakowski, Douglas T. Smith, Stuart T. Smith

Abstract

Laser interferometry has become a staple of SI-traceable displacement measurement techniques. With decreasing cost per channel, miniaturization, and a multitude of commercially available off-the-shelf systems, these systems create ever more attractive applications unheard-of few years ago. Although significant efforts have been made to shrink the size of the optical components necessary for a fully functioning laser interferometer sensor, most currently available commercial sensors have a sensing element on the order of millimeters or more. The goal of the work presented in this paper, which is based on our previous experience with fiber-based laser interferometer systems, was to build a directly SI-traceable laser interferometer displacement sensor with a sensor head no bigger than a single optical fiber diameter (0.125 mm). The sensor was designed and built specifically to serve as the primary displacement and force gauge sensor in an SI-traceable precision nanoindentation platform. Significant efforts were made to assure that each component not only performed a needed function but also contained known uncertainties or a specific methodology to ascertain uncertainty values.

Proceedings Title

Proceedings of the 29th Annual Meeting of the ASPE

Conference Dates

November 9-14, 2014

Conference Location

Boston, MA

Conference Title

29th Annual Meeting of the ASPE

Pub Type

Conferences

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Keywords

nanoindentation, instrumented indentation, interferometry, displacement metrology, SI-traceability

Citation

Nowakowski, B. , Smith, D. and Smith, S. (2014), DEVELOPMENT OF A MINIATURE, MULTICHANNEL, EXTENDED-RANGE FABRY-PEROT FIBER-OPTIC LASER INTERFEROMETER SYSTEM FOR LOW FREQUENCY SI-TRACEABLE DISPLACEMENT MEASUREMENT, Proceedings of the 29th Annual Meeting of the ASPE, Boston, MA, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=916508 (Accessed October 22, 2025)