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Detection of phosphorus in epitaxial silicon by EPR:

Published

Author(s)

Te-Tse Chang
Citation
- NBS IR 79-1748
Report Number
NBS IR 79-1748

Citation

Chang, T. (1979), Detection of phosphorus in epitaxial silicon by EPR:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NBS.IR.79-1748 (Accessed December 11, 2024)

Issues

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Created January 1, 1979, Updated May 19, 2023