Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Detection of phosphorus in epitaxial silicon by EPR:

Published

Author(s)

Te-Tse Chang
Citation
- NBS IR 79-1748
Report Number
NBS IR 79-1748

Citation

Chang, T. (1979), Detection of phosphorus in epitaxial silicon by EPR:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NBS.IR.79-1748 (Accessed April 16, 2024)
Created January 1, 1979, Updated May 19, 2023