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Design and Fabrication of Micromachined Passive Microwave Filtering Elements in CMOS Technology

Published

Author(s)

V. Milanovic, Michael Gaitan, E. D. Bowen, N. H. Tea, Mona E. Zaghloul
Proceedings Title
Proc., 1997 International Conference on Solid-State Sensors and Actuators - Transducers'97
Volume
2
Conference Dates
June 16-19, 1997
Conference Location
Chicago, IL, USA

Citation

Milanovic, V. , Gaitan, M. , Bowen, E. , Tea, N. and Zaghloul, M. (1997), Design and Fabrication of Micromachined Passive Microwave Filtering Elements in CMOS Technology, Proc., 1997 International Conference on Solid-State Sensors and Actuators - Transducers'97, Chicago, IL, USA (Accessed February 23, 2024)
Created December 30, 1997, Updated October 12, 2021