Stutzin, G.
, Rozsa, K.
and Gallagher, A.
(1993),
Deposition rates in dc diode sputtering, Journal of Vacuum Science and Technology A
(Accessed March 12, 2026)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Deposition rates in dc diode sputtering
Published
Author(s)
G C. Stutzin, K Rozsa, A Gallagher
Citation
Journal of Vacuum Science and Technology A
Volume
11
Pub Type
Journals
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact [email protected].
Created January 1, 1993, Updated February 17, 2017