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Deposition rates in dc diode sputtering

Published

Author(s)

G C. Stutzin, K Rozsa, A Gallagher
Citation
Journal of Vacuum Science and Technology A
Volume
11

Citation

Stutzin, G. , Rozsa, K. and Gallagher, A. (1993), Deposition rates in dc diode sputtering, Journal of Vacuum Science and Technology A (Accessed April 14, 2024)
Created January 1, 1993, Updated February 17, 2017