Stutzin, G.
, Rozsa, K.
and Gallagher, A.
(1993),
Deposition rates in dc diode sputtering, Journal of Vacuum Science and Technology A
(Accessed March 13, 2025)
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Deposition rates in dc diode sputtering
Published
Author(s)
G C. Stutzin, K Rozsa, A Gallagher
Citation
Journal of Vacuum Science and Technology A
Volume
11
Pub Type
Journals
Citation
Issues
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Created January 1, 1993, Updated February 17, 2017