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Dependence of inelastic electron mean free paths on electron energy and material

Published

Author(s)

Shigeo Tanuma, Cedric J. Powell, David R. Penn
Citation
Journal of Vacuum Science and Technology
Volume
A6
Issue
3

Citation

Tanuma, S. , Powell, C. and Penn, D. (1988), Dependence of inelastic electron mean free paths on electron energy and material, Journal of Vacuum Science and Technology (Accessed October 21, 2025)

Issues

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Created April 30, 1988, Updated October 12, 2021
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