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Demonstration of Molecular Assembly on Silicon (100) for CMOS-Compatible Molecule-Based Electronic Devices



Nadine E. Gergel-Hackett, Christopher D. Zangmeister, Christina A. Hacker, Lee J. Richter, Curt A. Richter


In this work, we establish the potential of a UV-promoted direct attachment of alkanes with alcohol and thiol linkers to the CMOS-compatible silicon (100) orientation for use in closed, planar, molecular electronic devices. We develop processes for molecular assembly on Si (100), characterize the molecular monolayers, and fabricate molecule-based Si (100) devices. Characterization of the self-assembled monolayers via Fourier transform infrared spectroscopy, spectroscopic ellipsometry, X-ray photoemission spectroscopy, and atomic force microscopy shows that the films assembled on the Si (100) are comparable in quality, aliphatic monolayer coverage, and extent of substrate oxidation to those assembled on the more extensively studied Si (111) crystal face. Si (100)-based molecular electronic devices were successfully fabricated, which exhibit molecule-dependent electrical characteristics. These data highlight the effectiveness of the assembly on Si (100) and the potential for the integration of these devices with more conventional technologies.
Journal of the American Chemical Society


molecular electronics, self-assembly, hybrid devices, CMOS


Gergel-Hackett, N. , Zangmeister, C. , Hacker, C. , Richter, L. and Richter, C. (2008), Demonstration of Molecular Assembly on Silicon (100) for CMOS-Compatible Molecule-Based Electronic Devices, Journal of the American Chemical Society, [online], (Accessed July 22, 2024)


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Created March 7, 2008, Updated January 27, 2020