Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Deep-subwavelength Nanometric Image Reconstruction using Fourier Domain Optical Normalization



Jing Qin, Richard M. Silver, Bryan M. Barnes, Hui Zhou, Ronald G. Dixson, Mark Alexander Henn


Quantitative optical measurements of deep sub-wavelength, three-dimensional, nanometric structures with sensitivity to sub-nanometer details address an ubiquitous measurement challenge. A Fourier domain normalization approach is used in the Fourier optical imaging code to simulate the full three-dimensional scattered light field of nominally 15 nm sized structures, accurately replicating the light field as a function of the focus position. Using the full three-dimensional light field, nanometer scale details such as a 2 nm thin conformal oxide and nanometer topography are rigorously fitted for features less than 1/30th of the wavelength in size. The densely packed structures are positioned nearly an order of magnitude closer than the conventional Rayleigh resolution limit and can be measured with sub-nanometer parametric uncertainties. This approach enables a practical measurement sensitivity to size variations of only a few atoms in size using a high throughput optical configuration with broad application in measuring nanometric structures and nanoelectronic devices.
Light: Science & Applications


nanometric structures, light scattering, quantitative nanoscale microscopy, metrology, polarized light, sub-nanometer uncertainties, nanotechnology


Qin, J. , Silver, R. , Barnes, B. , Zhou, H. , Dixson, R. and , M. (2015), Deep-subwavelength Nanometric Image Reconstruction using Fourier Domain Optical Normalization, Light: Science & Applications, [online], (Accessed April 21, 2024)
Created November 5, 2015, Updated November 10, 2018