Considerations for using Calibration Curves to Infer Oxide Stoichiometry from Atom Probe Tomography Data

Published

August 1, 2024

Author(s)

Ann Chiaramonti Debay, Daniel Schreiber, Karen Kruska, Kayla Yano

Abstract

Atom probe tomography (APT) is a powerful analytical technique whose strengths lie in its combination of three-dimensional reconstructions, (sub)nanometer spatial resolution, and nominally equal sensitivity to all elements across the periodic table. An additional strength of APT, at least in most cases, is its ability to measure local composition and composition variations with good yet typically ill-defined quantitative accuracy. Experienced researchers know that maximizing this accuracy requires some exploration of analysis conditions to understand quantitatively how the measured composition varies, followed by rigorous data treatment that, ideally, results in some estimate of a give measurement's quantitative uncertainty.

Citation

Microscopy and Microanalysis

Pub Type

Journals

Keywords

atom probe tomography, oxide stoichiometry

Citation

Chiaramonti Debay, A. , Schreiber, D. , Kruska, K. and Yano, K. (2024), Considerations for using Calibration Curves to Infer Oxide Stoichiometry from Atom Probe Tomography Data, Microscopy and Microanalysis (Accessed November 25, 2025)