Nyyssonen, D.
(1987),
Computer software for the computation of the scattered field and the optical microscope image of line objects patterned in thick layers:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NBS.IR.87-3618
(Accessed July 27, 2024)
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Computer software for the computation of the scattered field and the optical microscope image of line objects patterned in thick layers:
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- NBS IR 87-3618
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NBS IR 87-3618
Pub Type
NIST Pubs
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Created January 1, 1987, Updated May 19, 2023