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Computer software for the computation of the scattered field and the optical microscope image of line objects patterned in thick layers:

Published

Author(s)

D Nyyssonen
Citation
- NBS IR 87-3618
Report Number
NBS IR 87-3618

Citation

Nyyssonen, D. (1987), Computer software for the computation of the scattered field and the optical microscope image of line objects patterned in thick layers:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NBS.IR.87-3618 (Accessed June 24, 2024)

Issues

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Created January 1, 1987, Updated May 19, 2023