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Complete Inspection: In-situ system to inspect 100% of micro-parts

Published

Author(s)

Shawn P. Moylan

Abstract

On-machine measurement can provide significant advantages in part metrology at the micro/meso-scale. The strengths of measurement by fringe projection techniques directly address the difficulties presented by on-machine measurement. An experimental setup has been constructed using solely off-the-shelf components to perform on-machine measurements using fringe projection. The setup has been used to accurately measure typical micro/meso-scale parts and features including a step-height of 100 mm. Further improvements are necessary to improve measurement uncertainty and overcome important obstacles.
Citation
MicroManufacturing
Volume
3
Issue
1

Keywords

in-situ optical metrology, fringe projection, micro/meso-scale machine tools

Citation

Moylan, S. (2010), Complete Inspection: In-situ system to inspect 100% of micro-parts, MicroManufacturing, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=904609 (Accessed June 17, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created February 1, 2010, Updated February 19, 2017