Moylan, S.
(2010),
Complete Inspection: In-situ system to inspect 100% of micro-parts, MicroManufacturing, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=904609
(Accessed December 13, 2024)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Complete Inspection: In-situ system to inspect 100% of micro-parts
Published
Author(s)
Abstract
On-machine measurement can provide significant advantages in part metrology at the micro/meso-scale. The strengths of measurement by fringe projection techniques directly address the difficulties presented by on-machine measurement. An experimental setup has been constructed using solely off-the-shelf components to perform on-machine measurements using fringe projection. The setup has been used to accurately measure typical micro/meso-scale parts and features including a step-height of 100 mm. Further improvements are necessary to improve measurement uncertainty and overcome important obstacles.Citation
MicroManufacturing
Volume
3
Issue
1
Pub Type
Others
Download Paper
Keywords
in-situ optical metrology, fringe projection, micro/meso-scale machine tools
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created February 1, 2010, Updated February 19, 2017