Complete Inspection: In-situ system to inspect 100% of micro-parts
Shawn P. Moylan
On-machine measurement can provide significant advantages in part metrology at the micro/meso-scale. The strengths of measurement by fringe projection techniques directly address the difficulties presented by on-machine measurement. An experimental setup has been constructed using solely off-the-shelf components to perform on-machine measurements using fringe projection. The setup has been used to accurately measure typical micro/meso-scale parts and features including a step-height of 100 mm. Further improvements are necessary to improve measurement uncertainty and overcome important obstacles.
Complete Inspection: In-situ system to inspect 100% of micro-parts, MicroManufacturing, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=904609
(Accessed December 5, 2023)