We examine a short-open-load-reciprocal scattering parameter calibration in both in-line and orthogonal probe configurations. We explore its standard definitions and verify its accuracy by comparing it to a multiline thru-reflect-line calibration.
Proceedings Title: Tech Dig., Auto. RF Tech. Group Conf.
Conference Dates: June 7-12, 1998
Conference Location: Baltimore, MD
Pub Type: Conferences
electrical imedance standard, on-wafer calibration, wafer probes