Comparison of heteroepitaxial YBa2Cu3O7-δ and TiO2 thin film growth
Alexana Roshko, F. J. Stork, David A. Rudman, D. J. Aldrich, P. A. Hotsenpiller
The growth of heteroepitaxial YBa2Cu3O7-δ and TiO2 thin films has been investigated as a function of deposition rate. film thickness, and deposition temperature. In spite of the fact that the two materials are grown at very different rates and undercoolings, the films are found to have similar growth mechanisms and dependences on film thickness and deposition temperature. Both types of films were found to have an island growth morphology, as shown by STM and AFM. The diameter of the islands was found to increase with the film thickness through a power law dependence. It is shown that this is not the result of a grain growth mechanism, but is consistent with that predicted for a coarsening mechanism. The density of the islands decreased exponentially with increasing substrate temperature. The temperature dependence is consistent with those of homogeneous nucleation and of a diffusion-controlled process. The similar characteristics of the films of these two different materials suggest that YBa2Cu3O7-δ may be useful as a model system for studying heteroepitaxial oxide film growth.
, Stork, F.
, Rudman, D.
, Aldrich, D.
and Hotsenpiller, P.
Comparison of heteroepitaxial YBa<sub>2</sub>Cu<sub>3</sub>O<sub>7-δ</sub> and TiO<sub>2</sub> thin film growth, Journal of Crystal Growth, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=24067
(Accessed November 30, 2023)