Schenck, P.
and Kaiser, D.
(2017),
Combinatorial Tools for Inorganic Thin Films, Proceedings of the Knowledge Foundation, COMBI 2002
(Accessed June 16, 2025)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Combinatorial Tools for Inorganic Thin Films
Published
Author(s)
,
Abstract
We report the deveopment of a novel dual beam - dual target pulsed laser deposition (PLD) system for the production of compositionally-graded library films for combinatorial thin film materials research. In-situ process monitoring, including high-speed imaging of the laser-generated plumes, was used to fine-tune the deposition process.Citation
Proceedings of the Knowledge Foundation, COMBI 2002
Pub Type
Journals
Keywords
combinatorial, pulsed laser deposition, reflectometry, spectroscopic
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact [email protected].
Created February 19, 2017