Schenck, P.
and Kaiser, D.
(2017),
Combinatorial Tools for Inorganic Thin Films, Proceedings of the Knowledge Foundation, COMBI 2002
(Accessed May 18, 2025)
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Combinatorial Tools for Inorganic Thin Films
Published
Author(s)
,
Abstract
We report the deveopment of a novel dual beam - dual target pulsed laser deposition (PLD) system for the production of compositionally-graded library films for combinatorial thin film materials research. In-situ process monitoring, including high-speed imaging of the laser-generated plumes, was used to fine-tune the deposition process.Citation
Proceedings of the Knowledge Foundation, COMBI 2002
Pub Type
Journals
Keywords
combinatorial, pulsed laser deposition, reflectometry, spectroscopic
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Created February 19, 2017