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Combinatorial Tools for Inorganic Thin Films

Published

Author(s)

Peter K. Schenck, Debra L. Kaiser

Abstract

We report the deveopment of a novel dual beam - dual target pulsed laser deposition (PLD) system for the production of compositionally-graded library films for combinatorial thin film materials research. In-situ process monitoring, including high-speed imaging of the laser-generated plumes, was used to fine-tune the deposition process.
Citation
Proceedings of the Knowledge Foundation, COMBI 2002

Keywords

combinatorial, pulsed laser deposition, reflectometry, spectroscopic

Citation

Schenck, P. and Kaiser, D. (2017), Combinatorial Tools for Inorganic Thin Films, Proceedings of the Knowledge Foundation, COMBI 2002 (Accessed April 13, 2024)
Created February 19, 2017