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Coaxial Line Reflection Method for Dielectric Permittivity of Thin Film Samples at Microwave Frequencies - Numerical and Experimental Analysis
Published
Author(s)
Jan Obrzut
Abstract
We describe a measurement method for broadband dielectric permittivity of thin film materials at microwave frequencies utilizing a small-gap shunt capacitor terminating a coaxial line. The model expression for input impedance takes into consideration the wave propagation and inductance of the specimen section, and correlates the network parameters with the complex permittivity of the specimen. The method is suitable for testing dielectric materials having nominal thickness between 1 mm to 300 mm at frequencies of 100 MHz to 12 GHz and a dielectric constant of up to 60. With proper calibration and computation the frequency range can be extended to 18 GHz.
Proceedings Title
International Microwave Power Institutes Annual Symposium | 40th | | IMPI
Conference Dates
August 1, 0009
Conference Location
Boston, MA
Conference Title
International Microwave Power Institutes Annual Symposium
coaxial discontinuity, dielectric materials, high frequency measurements
Citation
Obrzut, J.
(2006),
Coaxial Line Reflection Method for Dielectric Permittivity of Thin Film Samples at Microwave Frequencies - Numerical and Experimental Analysis, International Microwave Power Institutes Annual Symposium | 40th | | IMPI, Boston, MA, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852656
(Accessed October 12, 2025)