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A Closed Loop Controller for Electron-beam Evaporators

Published

Author(s)

Alan H. Band, Joseph A. Stroscio

Abstract

A simple instrument for automatically controlling the deposition rate of an electronbeam evaporator is described. The design incorporates a commercially available, microprocessor based, Proportional-Integral-Differential (PID) process controller which provides loop control and automatic determination of optimal proportional, integral and differential loop constants. A logarithmic amplifier is used to linearize the overall loop response. The controller is used in conjunction with a compact electron-beam heated evaporator.
Citation
Review of Scientific Instruments
Volume
67
Issue
6

Citation

Band, A. and Stroscio, J. (1996), A Closed Loop Controller for Electron-beam Evaporators, Review of Scientific Instruments, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=620464 (Accessed April 21, 2024)
Created January 1, 1996, Updated February 19, 2017